Nauka innov. 2014, 10(5):24-33

Dan’ko V.A., Indutnyi I.Z., Lykanyuk M.V., Myn’ko V.I., Shepeliavyi P.E.
V.Ye. Lashkaryov Institute of Semiconductor Physics of the NAS of Ukraine, Kyiv


Production Technology of Holographic Diffraction Gratings Based on Inorganic Vacuum Photoresists

Section: Scientific and Technical Innovative Projects of National Academy of Sciences of Ukraine
Language: Ukrainian
Abstract: An innovative project on development of the technological method for holographic diffraction gratings production which allows to produce high-quality diffractive elements with spatial frequencies from 600 to 3600 mm–1 for spectral instruments have been carried out. The technological instructions for the implementation of this method have been developed and experimental samples are produced. It was established that the characteristics of experimental samples of the holographic diffraction gratings produced under this project meet the specifications and the state standard 3-6128-86.
Key words: diffraction grating, chalcogenide photo resists, spectral devices.

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